Spatial distribution of H atom density in high-density, helicon-wave H2 plasmas measured by laser-induced fluorescence

被引:0
|
作者
Nakamoto, M. [1 ]
Sasaki, K. [1 ]
Kadota, K. [1 ]
机构
[1] Department of Electronics, Nagoya University, Nagoya 464-8603, Japan
关键词
Laser-induced fluorescence (LIF);
D O I
10.1143/jjap.40.3431
中图分类号
学科分类号
摘要
引用
收藏
页码:3431 / 3432
相关论文
共 50 条
  • [21] DENSITY-MEASUREMENT OF O-ATOMS IN HELICON WAVE OXYGEN DISCHARGE BY 2-PHOTON LASER-INDUCED FLUORESCENCE
    KADOTA, K
    KONNO, Y
    AOTO, K
    SHOJI, T
    SATO, T
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1994, 33 (7B): : 4308 - 4311
  • [22] High density H2 and He plasmas: Can they be used to treat graphene?
    Mehedi, H-A
    Ferrah, D.
    Dubois, J.
    Petit-Etienne, C.
    Okuno, H.
    Bouchiat, V
    Renault, O.
    Cunge, G.
    JOURNAL OF APPLIED PHYSICS, 2018, 124 (12)
  • [24] High-density storage of H2 in microporous crystalline silica at ambient conditions
    van den Berg, Annemieke W. C.
    Pescarmona, Paolo P.
    Schoonman, Joop
    Jansen, Jacobus C.
    CHEMISTRY-A EUROPEAN JOURNAL, 2007, 13 (13) : 3590 - 3595
  • [25] Time-of-flight mass spectrometry of positive ions in helicon-wave excited high-density CF4 and C4F8 plasmas
    Sasaki, Koichi
    Ura, Kenichiro
    Suzuki, Kazunari
    Kadota, Kiyoshi
    Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers, 1997, 36 (3 A): : 1282 - 1286
  • [26] LASER-INDUCED FLUORESCENCE SPECTROSCOPY OF WF6/M(M = H2, AR) GAS-MIXTURES DURING LCVD OF W AT A HIGH LASER ENERGY DENSITY
    HESZLER, P
    MOGYOROSI, P
    CARLSSON, JO
    APPLIED SURFACE SCIENCE, 1993, 69 (1-4) : 272 - 276
  • [27] Effect of high density H2 plasmas on InGaP/GaAs and AlGaAs/GaAs HEMTs
    Ren, F
    Kopf, RF
    Kuo, JM
    Lothian, JR
    Lee, JW
    Pearton, SJ
    Shul, RJ
    Constantine, C
    Johnson, D
    SOLID-STATE ELECTRONICS, 1998, 42 (05) : 749 - 753
  • [28] Dry efficient cleaning of poly-methyl-methacrylate residues from graphene with high-density H2 and H2-N2 plasmas
    Cunge, G.
    Ferrah, D.
    Petit-Etienne, C.
    Davydova, A.
    Okuno, H.
    Kalita, D.
    Bouchiat, V.
    Renault, O.
    JOURNAL OF APPLIED PHYSICS, 2015, 118 (12)
  • [29] DENSITY DISTRIBUTION IN A HIGH-PRESSURE GAS JET MEASURED BY LASER-INDUCED GAS BREAKDOWN
    NEUSSER, HJ
    PUELL, H
    PHYSICS OF FLUIDS, 1972, 15 (07) : 1355 - &
  • [30] Formation and characterization of high-density FeSi nanodots on SiO2 induced by remote H2 plasma
    Zhang, Hai
    Makihara, Katsunori
    Ohta, Akio
    Ikeda, Mitsuhisa
    Miyazaki, Seiichi
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2016, 55 (01)