Time-of-flight mass spectrometry of positive ions in helicon-wave excited high-density CF4 and C4F8 plasmas

被引：0
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作者：
Sasaki, Koichi [1 ]
Ura, Kenichiro [1 ]
Suzuki, Kazunari [1 ]
Kadota, Kiyoshi [1 ]
机构：
[1] Nagoya Univ, Nagoya, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers | 1997年 / 36卷 / 3 A期
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摘要：
Plasmas
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页码：1282 / 1286
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