Spatial distribution of H atom density in high-density, helicon-wave H2 plasmas measured by laser-induced fluorescence

被引:0
|
作者
Nakamoto, M. [1 ]
Sasaki, K. [1 ]
Kadota, K. [1 ]
机构
[1] Department of Electronics, Nagoya University, Nagoya 464-8603, Japan
关键词
Laser-induced fluorescence (LIF);
D O I
10.1143/jjap.40.3431
中图分类号
学科分类号
摘要
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页码:3431 / 3432
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