Actuation properties of lead zirconate titanate thick films structured on Si membrane by the aerosol deposition method

被引：0
|
作者：
Lebedev, Maxim [1 ,3 ]
Akedo, Jun [1 ]
Akiyama, Yoshikazu [2 ]
机构：
[1] Mechanical Engineering Laboratory, A.I.S.T., M.I.T.I., 1-2 Namiki, Tsukuba, Ibaraki 305-8564, Japan
[2] R and D Center, RICOH Co., Ltd., 16-1 Shinei, Tsuzuki, Yokohama 224-0035, Japan
[3] JST Cooperative Researcher, 4-1-8 Honmachi, Kawaguchi, Saitama 332-0012, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2000年 / 39卷 / 9 B期
关键词：
Deposition - Interferometers - Laser applications - Lead compounds - Microactuators - Natural frequencies - Semiconducting silicon - Substrates - Thick films;
D O I：
10.1143/jjap.39.5600
中图分类号：
学科分类号：
摘要：
The results of the direct deposition of lead zirconate titanate [Pb(Zr0.52, Ti0.48)O3] (PZT) thick film on a Si-based structure are presented. The construction of a bottom electrode is very important for successful deposition. The actuation properties of PZT on the Si membrane were investigated. For a 6.2 × 6.1 mm2, 65-μm-thick Si membrane driven by a 4.7 × 4.3 mm2, 13-μm-thick PZT layer, the deflections, which were 1.5 μm upon applying 52 V at nonresonance frequency and 22 μm upon applying 8 V at resonance frequency, were measured.
引用
收藏
页码：5600 / 5603
相关论文
共 50 条
  • [41] Development of lead zirconate titanate family thick films on various substrates
    Akiyama, Y
    Yamanaka, K
    Fujisawa, E
    Kowata, Y
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1999, 38 (9B): : 5524 - 5527
  • [42] Microwave Hydrothermal Growth of Thick Epitaxial Lead Zirconate Titanate Films
    Pascal Pinceloup
    Paniz Foroughi
    Magdalena Oledzka
    Katherine Mikulka-Bolen
    Malgorzata M. Lencka
    Larry E. McCandlish
    Paul E. Burgener
    Daniel Kopp
    Richard E. Riman
    JOM, 2021, 73 : 3010 - 3020
  • [43] Processing of high performance lead lanthanum zirconate titanate thick films
    Kosec, M
    Holc, J
    Malic, B
    Bobnar, V
    JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 1999, 19 (6-7) : 949 - 954
  • [44] Development of lead zirconate titanate family thick films on various substrates
    Akiyama, Yoshikazu
    Yamanaka, Kunihiro
    Fujisawa, Etsuko
    Kowata, Yasutaro
    Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 1999, 38 (9 B): : 5524 - 5527
  • [45] Microwave Hydrothermal Growth of Thick Epitaxial Lead Zirconate Titanate Films
    Pinceloup, Pascal
    Foroughi, Paniz
    Oledzka, Magdalena
    Mikulka-Bolen, Katherine
    Lencka, Malgorzata M.
    Mccandlish, Larry E.
    Burgener, Paul E.
    Kopp, Daniel
    Riman, Richard E.
    JOM, 2021, 73 (10) : 3010 - 3020
  • [46] Effects of deposition temperature and seed layer on the optical properties of lead zirconate titanate films
    Kang, HS
    Lee, WJ
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2002, 20 (04): : 1498 - 1504
  • [47] Structural and ferroelectrical properties of (111) oriented lead zirconate titanate thick films for microultrasonic sensors
    Tanaka, T
    Li, XS
    Teeramongkonrasmee, A
    Suzuki, Y
    SENSORS AND MATERIALS, 2002, 14 (07) : 373 - 385
  • [48] Piezoelectric Endurance Properties of Lead Zirconate Titanate Thick Films for Micro-Device Applications
    Iijima, Takashi
    Kobayashi, Yuji
    Naganuma, Hiroshi
    Okamura, Soichiro
    FERROELECTRICS, 2009, 389 : 49 - 54
  • [49] Sol-gel derived lead zirconate titanate thick films and their improved pyroelectric properties
    Zhang, Q
    Shaw, CP
    Huang, Z
    Whatmore, RW
    INTEGRATED FERROELECTRICS, 2004, 64 : 207 - 216
  • [50] Study of properties of nanoscale lead zirconate titanate films
    Roshchin, V. M.
    Yakovlev, V. B.
    Silibin, M. V.
    Lovyagina, M. S.
    SEMICONDUCTORS, 2008, 42 (13) : 1492 - 1495
12345