Actuation properties of lead zirconate titanate thick films structured on Si membrane by the aerosol deposition method

被引：0
|
作者：
Lebedev, Maxim [1 ,3 ]
Akedo, Jun [1 ]
Akiyama, Yoshikazu [2 ]
机构：
[1] Mechanical Engineering Laboratory, A.I.S.T., M.I.T.I., 1-2 Namiki, Tsukuba, Ibaraki 305-8564, Japan
[2] R and D Center, RICOH Co., Ltd., 16-1 Shinei, Tsuzuki, Yokohama 224-0035, Japan
[3] JST Cooperative Researcher, 4-1-8 Honmachi, Kawaguchi, Saitama 332-0012, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2000年 / 39卷 / 9 B期
关键词：
Deposition - Interferometers - Laser applications - Lead compounds - Microactuators - Natural frequencies - Semiconducting silicon - Substrates - Thick films;
D O I：
10.1143/jjap.39.5600
中图分类号：
学科分类号：
摘要：
The results of the direct deposition of lead zirconate titanate [Pb(Zr0.52, Ti0.48)O3] (PZT) thick film on a Si-based structure are presented. The construction of a bottom electrode is very important for successful deposition. The actuation properties of PZT on the Si membrane were investigated. For a 6.2 × 6.1 mm2, 65-μm-thick Si membrane driven by a 4.7 × 4.3 mm2, 13-μm-thick PZT layer, the deflections, which were 1.5 μm upon applying 52 V at nonresonance frequency and 22 μm upon applying 8 V at resonance frequency, were measured.
引用
收藏
页码：5600 / 5603
相关论文
共 50 条
  • [31] Aerosol deposition method for preparation of lead zirconate titanate thick layer at low temperature - Improvement of electrical properties by irradiation of fast atom beam and plasma
    Akedo, J
    Lebedev, M
    Baba, S
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2003, 42 (9B): : 5931 - 5935
  • [32] Fast deposition of lead-zirconate-titanate thick films by arc discharged reactive ion-plating method
    Akamatsu, M
    Tani, M
    Yasuda, Y
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2002, 41 (11B): : 6976 - 6979
  • [33] Lead zirconate titanate thick films by sol-gel method for piezoelectric applications
    Ohya, Y
    Tamakoshi, T
    Ban, T
    Takahashi, Y
    ISAF 2002: PROCEEDINGS OF THE 13TH IEEE INTERNATIONAL SYMPOSIUM ON APPLICATIONS OF FERROELECTRICS, 2002, : 467 - 470
  • [34] Electrical Properties of Lead Zirconate Titanate Thin Films by a Hydrothermal Method
    Che, Lingjuan
    Cheng, Jinrong
    Yu, Shengwen
    Chen, Chao
    Meng, Zhongyan
    2006 15th IEEE International Symposium on Applications of Ferroelectrics, 2007, : 294 - 297
  • [35] Fabrication and electrical properties of lead zirconate titanate thick films on Si substrate by using lanthanum nickelate buffer layer
    Wang, G. S.
    Remiens, D.
    Dogheche, E.
    Herdier, R.
    Dong, X. L.
    JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 2006, 89 (11) : 3417 - 3420
  • [36] Scanning capacitance microscopy evaluation of lead zirconate titanate film formed by aerosol deposition method
    Naitou, Y
    Ogiso, H
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2006, 45 (3B): : 1922 - 1925
  • [37] Preparation and characterization of lead zirconate titanate thick films prepared by chemical solution deposition for MEMS applications
    Wang, Guangxu
    Ren, Wei
    Shi, Peng
    Wu, Xiaoqing
    CERAMICS INTERNATIONAL, 2015, 41 : S250 - S253
  • [38] Hydrothermal and electrophoretic deposition of lead zirconate titanate (PZT) films
    Su, B
    Ponton, CB
    Button, TW
    JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 2001, 21 (10-11) : 1539 - 1542
  • [39] Lead zirconate titanate films on metallic substrates by electrophoretic deposition
    Ng, SY
    Boccaccini, AR
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2005, 116 (02): : 208 - 214
  • [40] Printable thin-film lead zirconate titanate (PZT) deposition using an aerosol deposition printing method
    Marotta, Amanda
    Williams, Scott
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2018, 256
12345