Actuation properties of lead zirconate titanate thick films structured on Si membrane by the aerosol deposition method

被引：0

作者：

Lebedev, Maxim ^{[1
,3
]}

Akedo, Jun ^{[1
]}

Akiyama, Yoshikazu ^{[2
]}

机构：

[1] Mechanical Engineering Laboratory, A.I.S.T., M.I.T.I., 1-2 Namiki, Tsukuba, Ibaraki 305-8564, Japan

[2] R and D Center, RICOH Co., Ltd., 16-1 Shinei, Tsuzuki, Yokohama 224-0035, Japan

[3] JST Cooperative Researcher, 4-1-8 Honmachi, Kawaguchi, Saitama 332-0012, Japan

来源：

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2000年 / 39卷 / 9 B期

关键词：

Deposition - Interferometers - Laser applications - Lead compounds - Microactuators - Natural frequencies - Semiconducting silicon - Substrates - Thick films;

D O I：

10.1143/jjap.39.5600

中图分类号：

学科分类号：

摘要：

The results of the direct deposition of lead zirconate titanate [Pb(Zr0.52, Ti0.48)O3] (PZT) thick film on a Si-based structure are presented. The construction of a bottom electrode is very important for successful deposition. The actuation properties of PZT on the Si membrane were investigated. For a 6.2 × 6.1 mm2, 65-μm-thick Si membrane driven by a 4.7 × 4.3 mm2, 13-μm-thick PZT layer, the deflections, which were 1.5 μm upon applying 52 V at nonresonance frequency and 22 μm upon applying 8 V at resonance frequency, were measured.

引用

页码：5600 / 5603

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