NUMERICAL-SIMULATION OF SHEATH STRUCTURE AND CURRENT-VOLTAGE CHARACTERISTICS OF A CONDUCTOR-DIELECTRIC DISK IN A PLASMA

被引：10
|
作者：
CHAKY, RC
NONNAST, JH
ENOCH, J
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1981年 / 52卷 / 12期
关键词：
D O I：
10.1063/1.328744
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：7092 / 7098
页数：7
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