NUMERICAL-SIMULATION OF SHEATH STRUCTURE AND CURRENT-VOLTAGE CHARACTERISTICS OF A CONDUCTOR-DIELECTRIC DISK IN A PLASMA

被引：10

|

作者：

CHAKY, RC

NONNAST, JH

ENOCH, J

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1981年 / 52卷 / 12期

关键词：

D O I：

10.1063/1.328744

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：7092 / 7098

页数：7

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