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PROPERTIES OF CHEMICALLY VAPOR-DEPOSITED SILICON DIOXIDE FILMS .2. INTERACTION BETWEEN AL AND SIO2
被引:0
|
作者
:
MAEDA, K
论文数:
0
引用数:
0
h-index:
0
机构:
FUJITSU LTD,DEPT IC DEVICE ENGN,NAKAHARA KU,KAWASAKI,JAPAN
FUJITSU LTD,DEPT IC DEVICE ENGN,NAKAHARA KU,KAWASAKI,JAPAN
MAEDA, K
[
1
]
MAKABE, K
论文数:
0
引用数:
0
h-index:
0
机构:
FUJITSU LTD,DEPT IC DEVICE ENGN,NAKAHARA KU,KAWASAKI,JAPAN
FUJITSU LTD,DEPT IC DEVICE ENGN,NAKAHARA KU,KAWASAKI,JAPAN
MAKABE, K
[
1
]
机构
:
[1]
FUJITSU LTD,DEPT IC DEVICE ENGN,NAKAHARA KU,KAWASAKI,JAPAN
来源
:
DENKI KAGAKU
|
1977年
/ 45卷
/ 08期
关键词
:
D O I
:
暂无
中图分类号
:
O646 [电化学、电解、磁化学];
学科分类号
:
081704 ;
摘要
:
引用
收藏
页码:523 / 527
页数:5
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