ELECTRICAL-PROPERTIES OF GLOW-DISCHARGE A-SI-H THIN-FILMS PREPARED WITH A RF PLASMA ETCH UNIT

被引：1
|
作者：
AHMED, S [1 ]
SIGURD, D [1 ]
机构：
[1] INST MICROWAVE TECHNOL,S-10044 STOCKHOLM 70,SWEDEN
来源：
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1982年 / 69卷 / 01期
关键词：
D O I：
10.1002/pssa.2210690130
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：305 / 314
页数：10
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