ELECTRICAL-PROPERTIES OF GLOW-DISCHARGE A-SI-H THIN-FILMS PREPARED WITH A RF PLASMA ETCH UNIT

被引：1

作者：

AHMED, S ^{[1
]}

SIGURD, D ^{[1
]}

机构：

[1] INST MICROWAVE TECHNOL,S-10044 STOCKHOLM 70,SWEDEN

来源：

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1982年 / 69卷 / 01期

关键词：

D O I：

10.1002/pssa.2210690130

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：305 / 314

页数：10

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