GENERATION OF THIN-FILMS POLYMERIZED BY GLOW-DISCHARGE

被引：8
|
作者：
PACHONIK, H [1 ]
机构：
[1] SIEMENS AG,BEREICH UNTERNEHMENS BAUELEMENTE,D-8000 MUNICH 80,FED REP GER
来源：
THIN SOLID FILMS | 1976年 / 38卷 / 02期
关键词：
D O I：
10.1016/0040-6090(76)90224-8
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：171 / 182
页数：12
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