GLOW-DISCHARGE OPTICAL SPECTROSCOPY FOR ANALYSIS OF THIN-FILMS

被引：59

|

作者：

GREENE, JE ^{[1
]}

WHELAN, JM ^{[1
]}

机构：

[1] UNIV SO CALIF,DEPT MAT SCI,LOS ANGELES,CA 90007

来源：

JOURNAL OF APPLIED PHYSICS | 1973年 / 44卷 / 06期

关键词：

D O I：

10.1063/1.1662605

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：2509 / 2513

页数：5

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