GLOW-DISCHARGE OPTICAL SPECTROSCOPY FOR ANALYSIS OF THIN-FILMS

被引：59
|
作者：
GREENE, JE [1 ]
WHELAN, JM [1 ]
机构：
[1] UNIV SO CALIF,DEPT MAT SCI,LOS ANGELES,CA 90007
来源：
JOURNAL OF APPLIED PHYSICS | 1973年 / 44卷 / 06期
关键词：
D O I：
10.1063/1.1662605
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：2509 / 2513
页数：5
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