GENERATION OF THIN-FILMS POLYMERIZED BY GLOW-DISCHARGE

被引：8

作者：

PACHONIK, H ^{[1
]}

机构：

[1] SIEMENS AG,BEREICH UNTERNEHMENS BAUELEMENTE,D-8000 MUNICH 80,FED REP GER

来源：

THIN SOLID FILMS | 1976年 / 38卷 / 02期

关键词：

D O I：

10.1016/0040-6090(76)90224-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：171 / 182

页数：12

共 50 条

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