MODELING OF A RF GLOW-DISCHARGE PLASMA

被引：70
|
作者：
OKAZAKI, K
MAKABE, T
YAMAGUCHI, Y
机构：
来源：
APPLIED PHYSICS LETTERS | 1989年 / 54卷 / 18期
关键词：
D O I：
10.1063/1.101277
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：1742 / 1744
页数：3
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