MODELING OF A RF GLOW-DISCHARGE PLASMA

被引：70

作者：

OKAZAKI, K

MAKABE, T

YAMAGUCHI, Y

机构：

来源：

APPLIED PHYSICS LETTERS | 1989年 / 54卷 / 18期

关键词：

D O I：

10.1063/1.101277

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1742 / 1744

页数：3

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