MODELING OF A RF GLOW-DISCHARGE PLASMA

被引：70
|
作者：
OKAZAKI, K
MAKABE, T
YAMAGUCHI, Y
机构：
来源：
APPLIED PHYSICS LETTERS | 1989年 / 54卷 / 18期
关键词：
D O I：
10.1063/1.101277
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1742 / 1744
页数：3
相关论文
共 50 条
  • [41] RF GLOW-DISCHARGE OF SIF4-H2 MIXTURES - DIAGNOSTICS AND MODELING OF THE A-SI PLASMA DEPOSITION PROCESS
    BRUNO, G
    CAPEZZUTO, P
    CICALA, G
    JOURNAL OF APPLIED PHYSICS, 1991, 69 (10) : 7256 - 7267
  • [42] PHOTOLUMINESCENCE OF RF GLOW-DISCHARGE AMORPHOUS-CARBON FILMS
    FABISIAK, K
    ROZPLOCH, F
    SZATKOWSKI, J
    TARGOWSKI, P
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1991, 126 (01): : 275 - 280
  • [43] MONITORING OF RADIO-FREQUENCY GLOW-DISCHARGE PLASMA
    MUTSUKURA, N
    KOBAYASHI, K
    MACHI, Y
    JOURNAL OF APPLIED PHYSICS, 1989, 66 (10) : 4688 - 4695
  • [44] DISTRIBUTION OF ELECTROKINETIC PARAMETERS OF NEGATIVE GLOW-DISCHARGE PLASMA
    EVTUSHENKO, GS
    GRIDNEV, AG
    MURAVEV, II
    IZVESTIYA VYSSHIKH UCHEBNYKH ZAVEDENII FIZIKA, 1975, (09): : 80 - 87
  • [45] SURFACE FLUORINATION OF POLYMERS IN A GLOW-DISCHARGE PLASMA - PHOTOCHEMISTRY
    CORBIN, GA
    COHEN, RE
    BADDOUR, RF
    MACROMOLECULES, 1985, 18 (01) : 98 - 103
  • [46] PLASMA POLYMERIZATION INVESTIGATED BY A MAGNETICALLY ENHANCED GLOW-DISCHARGE
    SHARMA, AK
    MATSUZAWA, Y
    YASUDA, H
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1982, 184 (SEP): : 90 - ORPL
  • [47] PLASMA PARAMETERS OF A GLOW-DISCHARGE IN A CYCLOHEXANE + ARGON MIXTURE
    ALEKPEROV, GA
    IVANOV, YA
    POLAK, LS
    SLOVETSKII, DI
    HIGH ENERGY CHEMISTRY, 1977, 11 (06) : 473 - 477
  • [48] PRODUCTION OF DEFECTS IN MOLYBDENUM BY A DEUTERIUM GLOW-DISCHARGE PLASMA
    CHERNIKOV, VN
    ARUTYUNOVA, GA
    SOKURSKII, YN
    ZAKHAROV, AP
    SOVIET ATOMIC ENERGY, 1980, 48 (03): : 176 - 181
  • [49] SHOCK-WAVE DISPERSION IN GLOW-DISCHARGE PLASMA
    GRIDIN, AY
    KLIMOV, AI
    MOLEVICH, NE
    ZHURNAL TEKHNICHESKOI FIZIKI, 1993, 63 (03): : 157 - 162
  • [50] Transmission characteristics of microwave in a glow-discharge dusty plasma
    Jia, Jieshu
    Yuan, Chengxun
    Gao, Ruilin
    Liu, Sha
    Yue, Feng
    Wang, Ying
    Zhou, Zhong-Xiang
    Wu, Jian
    Li, Hui
    PHYSICS OF PLASMAS, 2016, 23 (07)
12345