On the Purity of Atmospheric Glow-Discharge Plasma

被引:5
|
作者
Anand, Venu [1 ]
Gowravaram, Mohan Rao [1 ]
机构
[1] Indian Inst Sci, Dept Instrumentat, Bangalore 560012, Karnataka, India
关键词
Atmospheric glow discharge; dielectric barrier; optical emission spectroscopy; X-ray photoelectron spectroscope; POWER;
D O I
10.1109/TPS.2009.2025949
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
Purity of the glow-discharge plasma at atmospheric pressure for surface modification applications is always debatable, since it works at ambient atmosphere. We have demonstrated on the use of optical emission spectroscopy to test the purity of this kind of plasma. The effect of gas flow pattern, nature of gas, and its flow rate on the plasma chemistry was studied. The importance of proper system design in maintaining a uniform flow of heavy and inert gases as carrier gas in atmospheric glow-discharge plasma was confirmed. The surface of a plasma-treated PET sample was analyzed using X-ray photoelectron spectroscopy to verify the studies on plasma purity done using emission spectrum.
引用
收藏
页码:1811 / 1816
页数:6
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