POSITIVE PHOTORESIST DEVELOPMENT - A MULTIPLE STATE PERCOLATION MODEL

被引：0
|
作者：
TREFONAS, P
机构：
来源：
ADVANCES IN RESIST TECHNOLOGY AND PROCESSING VI | 1989年 / 1086卷
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中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
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页码：484 / 494
页数：11
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