POSITIVE PHOTORESIST DEVELOPMENT - A MULTIPLE STATE PERCOLATION MODEL

被引：0
|
作者：
TREFONAS, P
机构：
来源：
ADVANCES IN RESIST TECHNOLOGY AND PROCESSING VI | 1989年 / 1086卷
关键词：
D O I：
暂无
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：484 / 494
页数：11
相关论文
共 50 条
  • [21] NEW TECHNOLOGY FOR USING POSITIVE PHOTORESIST - LOW TEMPERATURE DEVELOPMENT.
    Zhang Taiping
    Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors, 1984, 5 (05): : 529 - 533
  • [22] Development of Positive Photoresist for Controlling Cell Culture Shape on Organic Substrates
    Kumashiro, Yoshikazu
    Itoga, Kazuyoshi
    Kinoshita, Yohei
    Yamato, Masayuki
    Okano, Teruo
    CHEMISTRY LETTERS, 2013, 42 (07) : 741 - 743
  • [23] Positive-tone photoresist process for supercritical carbon dioxide development
    Pham, VQ
    Ferris, RJ
    Hamad, A
    Ober, CK
    CHEMISTRY OF MATERIALS, 2003, 15 (26) : 4893 - 4895
  • [24] EXACT SOLUTION OF DILLS MODEL-EQUATIONS FOR POSITIVE PHOTORESIST KINETICS
    BABU, SV
    BAROUCH, E
    IEEE ELECTRON DEVICE LETTERS, 1986, 7 (04) : 252 - 253
  • [25] CONTRAST IN POSITIVE PHOTORESIST SYSTEMS
    ZUBA, VT
    OWENS, RA
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1984, 187 (APR): : 8 - ACSC
  • [26] ADVANCED CHARACTERIZATION OF POSITIVE PHOTORESIST
    DANIELS, BK
    TREFONAS, P
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1987, 134 (03) : C123 - C123
  • [27] SIMULTANEOUS EXPOSURE AND DEVELOPMENT OF PHOTORESIST MATERIALS - ANALYTICAL MODEL
    AGMON, P
    LIVANOS, AC
    KATZIR, A
    YARIV, A
    APPLIED OPTICS, 1977, 16 (10) : 2612 - 2614
  • [28] Teratogenicity in avian embryo model system upon exposure to positive photoresist
    Steele, Valerie M.
    Canning, David R.
    Keller, Randal J.
    Kraemer, David
    SSA Journal: Journal of the Semiconductor Safety Association, 2001, 15 (01): : 16 - 21
  • [29] ABSORPTION AND EXPOSURE IN POSITIVE PHOTORESIST
    MACK, CA
    APPLIED OPTICS, 1988, 27 (23): : 4913 - 4919
  • [30] BAKE EFFECTS IN POSITIVE PHOTORESIST
    BATCHELDER, T
    PIATT, J
    SOLID STATE TECHNOLOGY, 1983, 26 (08) : 211 - 217
12345