MICROANALYSES OF TANTALUM OXIDE-FILMS ON SI SUBSTRATE DEPOSITED BY DYNAMIC ION-BEAM MIXING

被引：0
|
作者：
HUANG, NK
WANG, DZ
机构：
[1] Institute of Nuclear Science and Technology, Sichuan University, Chengdu
来源：
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1995年 / 147卷 / 02期
关键词：
D O I：
10.1002/pssa.2211470240
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
[No abstract available]
引用
收藏
页码：K83 / K85
页数：3
相关论文
共 50 条
  • [41] THE NUCLEATION AND GROWTH OF THIN-FILMS DEPOSITED ON TO CARBON SUBSTRATE BY ION-BEAM SPUTTERING
    KANAYA, K
    YAMAMOTO, Y
    YONEHARA, K
    JOURNAL OF ELECTRON MICROSCOPY, 1989, 38 (04): : 273 - 273
  • [42] THE NUCLEATION AND GROWTH OF THIN-FILMS DEPOSITED ON TO CARBON SUBSTRATE BY ION-BEAM SPUTTERING
    KANAYA, K
    BABA, N
    YAMAMOTO, Y
    YONEHARA, K
    MICRON AND MICROSCOPICA ACTA, 1988, 19 (04): : 189 - 199
  • [43] AN OVERVIEW OF THE ION-BEAM MIXING RATES IN PD/SI BILAYERS VERSUS THE TEMPERATURE AND DEPOSITED ENERGY
    DESIMONI, J
    TRAVERSE, A
    MEDICI, MG
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1992, 72 (02): : 197 - 201
  • [44] USE OF ION-BEAM TECHNIQUES TO CHARACTERIZE THIN PLASMA GROWN GAAS AND GAALAS OXIDE-FILMS
    KAUFFMAN, RL
    FELDMAN, LC
    CHANG, RPH
    NUCLEAR INSTRUMENTS & METHODS, 1978, 149 (1-3): : 619 - 622
  • [45] ION-BEAM MIXING OF MARKER LAYERS IN AL AND SI
    MANTL, S
    REHN, LE
    AVERBACK, RS
    THOMPSON, LJ
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR): : 622 - 625
  • [46] ION-BEAM MIXING OF TI/SI-LAYERS
    KOHLHOF, K
    MANTL, S
    STRITZKER, B
    VIDE-SCIENCE TECHNIQUE ET APPLICATIONS, 1987, 42 (236): : 129 - 131
  • [47] FORMATION OF BETA-SIC FILMS BY ION-BEAM MIXING OF SI/C MULTILAYERS
    RIVIERE, JP
    ZAYTOUNI, M
    DENANOT, MF
    ALLAIN, J
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1995, 29 (1-3): : 105 - 109
  • [48] ELECTRICAL-PROPERTIES AND STRUCTURES OF TANTALUM THIN-FILMS DEPOSITED BY BIAS ION-BEAM SPUTTERING
    SHIOYAMA, T
    OGAWA, S
    YAMANAKA, K
    THIN SOLID FILMS, 1979, 58 (01) : 127 - 127
  • [49] Modified physical properties by ion-beam mixing of Fe-Si multilayered films
    Park, JS
    Kim, CO
    Lee, YP
    Kudryavtsev, YV
    Dubowik, J
    Szymanski, B
    Rhee, JY
    JOURNAL OF APPLIED PHYSICS, 2002, 91 (10) : 7194 - 7196
  • [50] Modification of the structure and the physical properties of Fe/Si multilayered films by ion-beam mixing
    Kudryavtsev, YV
    Lee, YP
    Dubowik, J
    Szymanski, B
    PHYSICAL REVIEW B, 2002, 65 (10) : 1 - 9
12345