STRUCTURE OF SILICON OXIDE FILMS

被引:65
|
作者
COLEMAN, MV
THOMAS, DJD
机构
来源
PHYSICA STATUS SOLIDI | 1967年 / 22卷 / 02期
关键词
D O I
10.1002/pssb.19670220231
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
引用
收藏
页码:593 / &
相关论文
共 50 条
  • [31] STRUCTURE OF WILLEMITE FILMS ON SILICON
    EDWARDS, GS
    RUSHBY, AN
    JOURNAL OF MATERIALS SCIENCE, 1971, 6 (03) : 225 - &
  • [32] ON THE STRUCTURE OF SILICON AND ALUMINUM FILMS
    FATU, D
    SEGAL, E
    REVUE ROUMAINE DE CHIMIE, 1993, 38 (07) : 859 - 864
  • [33] Silicon nanocrystal formation in silicon rich silicon oxide thin films
    Roschuk, T
    Wojcik, J
    Irving, EA
    Flynn, M
    Mascher, P
    APPLICATIONS OF PHOTONIC TECHNOLOGY, CLOSING THE GAP BETWEEN THEORY, DEVELOPMENT, AND APPLICATION, PT 1 AND 2, 2004, 5577 : 450 - 458
  • [34] THE STRUCTURE OF ULTRATHIN OXIDE ON SILICON
    KRIVANEK, OL
    MAZUR, JH
    APPLIED PHYSICS LETTERS, 1980, 37 (04) : 392 - 394
  • [35] THE MOLECULAR-STRUCTURE OF AUTOPHOBED MONOLAYERS AND PRECURSING FILMS OF A CATIONIC SURFACTANT ON THE SILICON-OXIDE SILICON SURFACE
    BIRCH, WR
    KNEWTSON, MA
    GAROFF, S
    SUTER, RM
    SATIIA, S
    COLLOIDS AND SURFACES A-PHYSICOCHEMICAL AND ENGINEERING ASPECTS, 1994, 89 (2-3) : 145 - 155
  • [36] Structure of silicon/oxide and nitride/oxide interfaces
    Gritsenko, V. A.
    PHYSICS-USPEKHI, 2009, 52 (09) : 869 - 877
  • [37] Depth profile of fixed charge in epitaxial oxide films on silicon substrate for MFIS structure
    Yamada, T
    Wakiya, N
    Shinozaki, K
    Mizutani, N
    ISAF 2002: PROCEEDINGS OF THE 13TH IEEE INTERNATIONAL SYMPOSIUM ON APPLICATIONS OF FERROELECTRICS, 2002, : 159 - 162
  • [38] Chemical and electronic structure of ultrathin zirconium oxide films on silicon as determined by photoelectron spectroscopy
    Miyazaki, S
    Narasaki, M
    Ogasawara, M
    Hirose, M
    SOLID-STATE ELECTRONICS, 2002, 46 (11) : 1679 - 1685
  • [39] Conformity and structure of titanium oxide films grown by atomic layer deposition on silicon substrates
    Jogi, Indrek
    Pars, Martti
    Aarik, Jaan
    Aidla, Aleks
    Laan, Matti
    Sundqvist, Jonas
    Oberbeck, Lars
    Heitmann, Johannes
    Kukli, Kaupo
    THIN SOLID FILMS, 2008, 516 (15) : 4855 - 4862
  • [40] Molecular Structure and Dynamics in Thin Water Films at Metal Oxide Surfaces: Magnesium, Aluminum, and Silicon Oxide Surfaces
    Anh Phan
    Ho, Tuan A.
    Cole, D. R.
    Striolo, A.
    JOURNAL OF PHYSICAL CHEMISTRY C, 2012, 116 (30): : 15962 - 15973