STRUCTURE OF SILICON OXIDE FILMS

被引:65
|
作者
COLEMAN, MV
THOMAS, DJD
机构
来源
PHYSICA STATUS SOLIDI | 1967年 / 22卷 / 02期
关键词
D O I
10.1002/pssb.19670220231
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
引用
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页码:593 / &
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