共 50 条
- [22] Determination of plasma parameters in rf glow-discharge plasma NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2009, 267 (18): : 3263 - 3266
- [25] TRANSFER PROCESSES IN ACTIVATED PLASMA OF GLOW-DISCHARGE PISMA V ZHURNAL TEKHNICHESKOI FIZIKI, 1988, 14 (06): : 488 - 491
- [27] DISSOCIATION OF FLUORINE MOLECULES IN A GLOW-DISCHARGE PLASMA ZHURNAL FIZICHESKOI KHIMII, 1977, 51 (05): : 1213 - 1215
- [29] MODELING AND SIMULATION OF GLOW-DISCHARGE PLASMA REACTORS JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1994, 12 (04): : 1229 - 1236