THERMAL OXIDATION OF SPUTTERED TANTALUM THIN FILMS BETWEEN 100 DEGREES C AND 525 DEGREES C

被引：54

|

作者：

STEIDEL, CA

GERSTENBERG, D

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1969年 / 40卷 / 09期

关键词：

D O I：

10.1063/1.1658279

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：3828 / +

页数：1

相关论文

共 50 条

[1] OXIDATION KINETICS OF MOLYBDENITE AT 525 DEGREES TO 635 DEGREES C
AMMANN, PR
LOOSE, TA
METALLURGICAL TRANSACTIONS, 1971, 2 (03): : 889 - &
[2] OXIDATION PROPERTIES OF TANTALUM BETWEEN 400-DEGREES-C AND 530-DEGREES-C
CATHCART, JV
BAKISH, R
NORTON, DR
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1960, 107 (08) : 668 - 670
[3] THE OXIDATION BEHAVIOR OF TANTALUM AT 700-DEGREES-C-1000-DEGREES-C
KOFSTAD, P
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1963, 110 (06) : 491 - 501
[4] STUDIES OF THE OXIDATION OF TANTALUM AT 1000-DEGREES-C-1300-DEGREES-C
KOFSTAD, P
JOURNAL OF THE LESS-COMMON METALS, 1963, 5 (02): : 158 - 170
[5] OXIDATION-KINETICS OF CU THIN-FILMS IN AIR AT 100-DEGREES-C TO 300-DEGREES-C
NIKA, RJ
HALL, PM
IEEE TRANSACTIONS ON COMPONENTS HYBRIDS AND MANUFACTURING TECHNOLOGY, 1979, 2 (04): : 412 - 422
[6] FORMATION OF THIN OXIDE FILMS ON IRON BETWEEN 150 DEGREES C AND 500 DEGREES C
NEEDHAM, PB
LEAVENWO.HW
SARTWELL, BD
JOURNAL OF METALS, 1970, 22 (12): : A46 - &
[7] THERMAL-CONDUCTIVITY OF POTATO BETWEEN 50-DEGREES-C AND 100-DEGREES-C
CALIFANO, AN
CALVELO, A
JOURNAL OF FOOD SCIENCE, 1991, 56 (02) : 586 - &
[8] The thermal and electrical conductivities of several metals between-183 degrees C and 100 degrees C
Kannuluik, WG
PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-CONTAINING PAPERS OF A MATHEMATICAL AND PHYSICAL CHARACTER, 1933, 141 (843) : 159 - 168
[9] XPS STUDIES ON NBN THIN-FILMS - RF CLEANING, NATIVE OXIDATION AND THERMAL-OXIDATION BETWEEN 20-DEGREES-C AND 200-DEGREES-C. COMPARISON WITH NB THIN-FILMS
ERMOLIEFF, A
REVUE DE PHYSIQUE APPLIQUEE, 1984, 19 (12): : 979 - 986
[10] OXIDATION OF TITANIUM BETWEEN 25 DEGREES C AND 400 DEGREES C
SMITH, T
SURFACE SCIENCE, 1973, 38 (02) : 292 - 312

← 1 2 3 4 5 →