X-RAY-ANALYSIS OF STRAIN IN TITANIUM NITRIDE LAYERS

被引：36
|
作者：
VALVODA, V [1 ]
MUSIL, J [1 ]
机构：
[1] CZECHOSLOVAK ACAD SCI, INST PHYS, CS-18040 PRAGUE 8, CZECHOSLOVAKIA
来源：
THIN SOLID FILMS | 1987年 / 149卷 / 01期
关键词：
D O I：
10.1016/0040-6090(87)90247-1
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：49 / 60
页数：12
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