X-RAY-ANALYSIS OF STRAIN IN TITANIUM NITRIDE LAYERS

被引：36

作者：

VALVODA, V ^{[1
]}

MUSIL, J ^{[1
]}

机构：

[1] CZECHOSLOVAK ACAD SCI, INST PHYS, CS-18040 PRAGUE 8, CZECHOSLOVAKIA

来源：

THIN SOLID FILMS | 1987年 / 149卷 / 01期

关键词：

D O I：

10.1016/0040-6090(87)90247-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：49 / 60

页数：12

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