CONTACTS OF REFRACTORY-METALS ON THERMALLY CLEANED SILICON SURFACES

被引：1
|
作者：
ALEKSANDROV, LN
LOVYAGIN, RN
SIMONOV, PA
机构：
来源：
THIN SOLID FILMS | 1980年 / 70卷 / 01期
关键词：
D O I：
10.1016/0040-6090(80)90406-X
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：11 / 15
页数：5
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