MICROWAVE GLOW-DISCHARGE DEPOSITION OF THIN SILICON-NITRIDE FILMS

被引：0

作者：

RUZICKA, M ^{[1
]}

机构：

[1] UNIV JE PURKYNE, FAC SCI, DEPT EXPTL PHYS, KOTLARSKA 2, 61137 BRNO, CZECHOSLOVAKIA

来源：

CZECHOSLOVAK JOURNAL OF PHYSICS | 1974年 / B 24卷 / 04期

关键词：

D O I：

10.1007/BF01594082

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：465 / 468

页数：4

共 50 条

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