MICROWAVE GLOW-DISCHARGE DEPOSITION OF THIN SILICON-NITRIDE FILMS

被引：0
|
作者：
RUZICKA, M [1 ]
机构：
[1] UNIV JE PURKYNE, FAC SCI, DEPT EXPTL PHYS, KOTLARSKA 2, 61137 BRNO, CZECHOSLOVAKIA
来源：
CZECHOSLOVAK JOURNAL OF PHYSICS | 1974年 / B 24卷 / 04期
关键词：
D O I：
10.1007/BF01594082
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
引用
收藏
页码：465 / 468
页数：4
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