PRODUCTION OF SILICON-NITRIDE FILMS FROM HEXAMETHYLCYCLOTRISILAZANE IN A HIGH-FREQUENCY GLOW-DISCHARGE

被引：0
|
作者：
VORONKOV, MG
SULIMIN, AD
IACHMENEV, VV
MIRSKOV, RG
KOKIN, VN
CHERNOVA, VG
机构：
来源：
DOKLADY AKADEMII NAUK SSSR | 1981年 / 259卷 / 05期
关键词：
D O I：
暂无
中图分类号：
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号：
07 ; 0710 ; 09 ;
摘要：
引用
收藏
页码：1130 / 1132
页数：3
相关论文
共 50 条
  • [1] DEPOSITION OF SILICON-NITRIDE FILMS BY MICROWAVE GLOW-DISCHARGE
    SHIMA, Y
    MIYAZAKI, T
    NAKAMURA, N
    ADACHI, E
    TOKUYAMA, T
    JAPANESE JOURNAL OF APPLIED PHYSICS, 1973, 12 (02) : 309 - 310
  • [2] MICROWAVE GLOW-DISCHARGE DEPOSITION OF THIN SILICON-NITRIDE FILMS
    RUZICKA, M
    CZECHOSLOVAK JOURNAL OF PHYSICS, 1974, B 24 (04) : 465 - 468
  • [3] CHARACTERIZATION OF SILICON-NITRIDE FILMS FORMED IN AN RF GLOW-DISCHARGE
    MURAKAMI, K
    TAKEUCHI, T
    ISHIKAWA, K
    YAMAMOTO, T
    APPLIED SURFACE SCIENCE, 1988, 33-4 : 742 - 749
  • [4] ODMR IN GLOW-DISCHARGE DEPOSITED SILICON-NITRIDE
    LOWE, AJ
    CAVENETT, BC
    HOMEWOOD, KP
    POWELL, MJ
    ELLIOTT, SR
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 1985, 77-8 : 735 - 738
  • [5] GLOW-DISCHARGE SYNTHESIS OF SILICON-NITRIDE PRECURSOR POWDERS
    HO, P
    BUSS, RJ
    LOEHMAN, RE
    JOURNAL OF MATERIALS RESEARCH, 1989, 4 (04) : 873 - 881
  • [6] THE EFFECT OF GLOW-DISCHARGE CHARACTERISTICS ON THE PROPERTIES OF PLASMA-CVD SILICON-NITRIDE FILMS
    HIRAIWA, A
    MUKAI, K
    TAKAHASHI, S
    HARADA, S
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1981, 128 (03) : C104 - C105
  • [7] Preparation of polymer films from hexamethylcyclotrisilazane in the plasma of high-frequency discharge
    Smirnova, T.P.
    Khramova, L.V.
    Belyi, V.I.
    Solov'yev, A.P.
    Taranova, I.V.
    Polymer science USSR, 1988, 30 (01): : 182 - 188
  • [8] PREPARATION OF POLYMER-FILMS FROM HEXAMETHYLCYCLOTRISILAZANE IN HIGH-FREQUENCY DISCHARGE PLASMA
    SMIRNOVA, TP
    KHRAMOVA, LV
    BELYI, VI
    SOLOVEV, AP
    TARANOVA, IV
    VYSOKOMOLEKULYARNYE SOEDINENIYA SERIYA A, 1988, 30 (01): : 164 - 169
  • [9] DECOMPOSITION OF PCB IN A HIGH-FREQUENCY GLOW-DISCHARGE PLASMA
    HIRAOKA, K
    MITSUMORI, K
    MOCHIZUKI, S
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1979, (APR): : 65 - 65
  • [10] Optical transmission measurements on glow-discharge amorphous silicon nitride films
    Ay, I.
    Tolunay, H.
    2001, TUBITAK (25):
12345