IN-DEPTH ELEMENTAL ANALYSIS OF THIN-FILMS BY GLOW-DISCHARGE MASS-SPECTROMETRY

被引：0

作者：

COBURN, JW ^{[1
]}

机构：

[1] IBM CORP,RES LAB,SAN JOSE,CA 95193

来源：

ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 1974年

关键词：

D O I：

暂无

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

引用

页码：92 / 92

页数：1

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