ELECTRICAL PROFILING AND OPTICAL ACTIVATION STUDIES OF BE-IMPLANTED GAAS

被引：63
|
作者：
MCLEVIGE, WV
HELIX, MJ
VAIDYANATHAN, KV
STREETMAN, BG
机构：
[1] UNIV ILLINOIS,COORDINATED SCI LAB,URBANA,IL 61801
[2] UNIV ILLINOIS,DEPT ELECT ENGN,URBANA,IL 61801
来源：
JOURNAL OF APPLIED PHYSICS | 1977年 / 48卷 / 08期
关键词：
D O I：
10.1063/1.324218
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：3342 / 3346
页数：5
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