SEMICONDUCTOR MICROCRYSTALS DOPED IN SILICA GLASS THIN-FILMS PREPARED BY RF-SPUTTERING

Semiconductor microcrystals, such as CdSe, CdTe, GaAs and Ge can be successfully doped in silica glass thin films by an rf-sputtering technique. The size of the microcrystals was strongly dependent on sputtering conditions. From optical absorption spectra, the quantum size effect could be seen from the crystals doped in the films, and the shift of the absorption edge basically satisfied the theoretical relationship with respect to the mean microcrystal size.