PROPERTIES OF REACTIVELY-SPUTTERED COPPER-OXIDE THIN-FILMS

被引：210
|
作者：
DROBNY, VF
PULFREY, DL
机构：
来源：
THIN SOLID FILMS | 1979年 / 61卷 / 01期
关键词：
D O I：
10.1016/0040-6090(79)90504-2
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：89 / 98
页数：10
相关论文
共 50 条
  • [31] STRUCTURAL STUDIES OF REACTIVELY SPUTTERED CARBON NITRIDE THIN-FILMS
    KUMAR, S
    TANSLEY, TL
    THIN SOLID FILMS, 1995, 256 (1-2) : 44 - 47
  • [32] Preparation and piezoresistive properties of reactively sputtered indium tin oxide thin films
    Dyer, SE
    Gregory, OJ
    Amons, PS
    Slot, AB
    THIN SOLID FILMS, 1996, 288 (1-2) : 279 - 286
  • [33] PROPERTIES OF REACTIVELY DC-MAGNETRON-SPUTTERED A1N THIN-FILMS
    RILLE, E
    ZARWASCH, R
    PULKER, HK
    THIN SOLID FILMS, 1993, 228 (1-2) : 215 - 217
  • [34] DEPOSITION AND PROPERTIES OF REACTIVELY SPUTTERED RUTHENIUM DIOXIDE THIN-FILMS AS AN ELECTRODE FOR FERROELECTRIC CAPACITORS
    LEE, JG
    MIN, SK
    CHOH, SH
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1994, 33 (12B): : 7080 - 7085
  • [35] REACTIVELY SPUTTERED ZIRCONIUM CARBIDES, CARBONITRIDES AND NITRIDES THIN-FILMS - OPTICAL-PROPERTIES
    BONNOT, AM
    BELKHIR, H
    PAILHAREY, D
    MATHIEZ, P
    SOLAR ENERGY MATERIALS, 1986, 14 (3-5): : 375 - 384
  • [36] STRUCTURE AND MAGNETIC-PROPERTIES OF RF REACTIVELY SPUTTERED IRON NITRIDE THIN-FILMS
    CHANG, C
    SIVERTSEN, JM
    JUDY, JH
    IEEE TRANSACTIONS ON MAGNETICS, 1987, 23 (05) : 3636 - 3638
  • [37] WORKING GAS-PRESSURE AND FLOW EFFECTS ON REACTIVELY SPUTTERED MOLYBDENUM OXIDE THIN-FILMS
    JANKOWSKI, AF
    SCHRAWYER, LR
    SURFACE & COATINGS TECHNOLOGY, 1992, 54 (1-3): : 349 - 354
  • [38] REACTIVELY SPUTTERED INDIUM TIN OXIDE POLYCRYSTALLINE THIN-FILMS AS NO AND NO2 GAS SENSORS
    SBERVEGLIERI, G
    BENUSSI, P
    COCCOLI, G
    GROPELLI, S
    NELLI, P
    THIN SOLID FILMS, 1990, 186 (02) : 349 - 360
  • [39] REACTIVELY SPUTTERED OXIDE FILMS
    LIEBERMAN, ML
    MEDRUD, RC
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1969, 116 (02) : 242 - +
  • [40] OCCURRENCE AND ORIGIN OF COPPER-OXIDE PARTICULATES PRIOR TO THE DEPOSITION OF YBACUO THIN-FILMS
    BUSCH, H
    FINK, A
    MULLER, A
    SAMWER, K
    SUPERCONDUCTOR SCIENCE & TECHNOLOGY, 1992, 5 (11): : 624 - 626
12345