PROPERTIES OF REACTIVELY-SPUTTERED COPPER-OXIDE THIN-FILMS

被引：210
|
作者：
DROBNY, VF
PULFREY, DL
机构：
来源：
THIN SOLID FILMS | 1979年 / 61卷 / 01期
关键词：
D O I：
10.1016/0040-6090(79)90504-2
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：89 / 98
页数：10
相关论文
共 50 条
  • [21] COPPER-OXIDE THIN-FILMS GROWN BY PLASMA EVAPORATION METHOD
    SANTRA, K
    SARKAR, CK
    MUKHERJEE, MK
    GHOSH, B
    THIN SOLID FILMS, 1992, 213 (02) : 226 - 229
  • [22] OPTICAL-CONSTANTS OF REACTIVELY-SPUTTERED NBN FILMS
    KONEVECKI, MW
    WESTRA, KL
    SULLIVAN, BT
    KORNELSON, KE
    BRETT, MJ
    THIN SOLID FILMS, 1993, 232 (02) : 228 - 231
  • [23] RECENT DEVELOPMENTS IN REACTIVELY SPUTTERED OPTICAL THIN-FILMS
    PAWLEWICZ, WT
    MARTIN, PM
    HAYS, DD
    MANN, IB
    PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1982, 325 : 105 - 116
  • [24] Tuning the structure and preferred orientation in reactively sputtered copper oxide thin films
    Wang, Y.
    Ghanbaja, J.
    Soldera, F.
    Migot, S.
    Boulet, P.
    Horwat, D.
    Muecklich, F.
    Pierson, J. F.
    APPLIED SURFACE SCIENCE, 2015, 335 : 85 - 91
  • [25] PREPARATION AND CHARACTERIZATION OF REACTIVELY-SPUTTERED AMORPHOUS SI - H FILMS
    IIZIMA, S
    OKUSHI, H
    MATSUDA, A
    YAMASAKI, S
    NAKAGAWA, K
    MATSUMURA, M
    TANAKA, K
    JAPANESE JOURNAL OF APPLIED PHYSICS, 1980, 19 : 521 - 526
  • [26] OPTICAL-PROPERTIES AND MICROSTRUCTURE OF REACTIVELY SPUTTERED INDIUM NITRIDE THIN-FILMS
    SULLIVAN, BT
    PARSONS, RR
    WESTRA, KL
    BRETT, MJ
    JOURNAL OF APPLIED PHYSICS, 1988, 64 (08) : 4144 - 4149
  • [27] COPPER AND COPPER-OXIDE THIN-FILMS OBTAINED BY METALORGANIC MICROWAVE PLASMA CVD
    WISNIEWSKI, B
    DURAND, J
    COT, L
    JOURNAL DE PHYSIQUE IV, 1991, 1 (C2): : 389 - 395
  • [28] EFFECT OF HEAT-TREATMENT ON REACTIVELY SPUTTERED IRON-OXIDE THIN-FILMS
    LIN, JK
    SIVERTSEN, JM
    JUDY, JH
    JOURNAL OF APPLIED PHYSICS, 1985, 57 (08) : 4000 - 4002
  • [29] DOPING THIN-FILMS OF COPPER-OXIDE AND SPARK MASS-SPECTROMETRY
    HIERNAUT, JP
    ROCH, A
    THIN SOLID FILMS, 1980, 71 (01) : 111 - 116
  • [30] STRESSES IN SPUTTER-DEPOSITED NICKEL AND COPPER-OXIDE THIN-FILMS
    PLUNKETT, PV
    JOHNSON, RM
    WISEMAN, CD
    THIN SOLID FILMS, 1979, 64 (01) : 121 - 128
12345