MONITORING OF RADIO-FREQUENCY GLOW-DISCHARGE PLASMA

被引：38
|
作者：
MUTSUKURA, N
KOBAYASHI, K
MACHI, Y
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1989年 / 66卷 / 10期
关键词：
D O I：
10.1063/1.343826
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：4688 / 4695
页数：8
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