MONITORING OF RADIO-FREQUENCY GLOW-DISCHARGE PLASMA

被引：38

|

作者：

MUTSUKURA, N

KOBAYASHI, K

MACHI, Y

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 66卷 / 10期

关键词：

D O I：

10.1063/1.343826

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：4688 / 4695

页数：8

相关论文

共 50 条

[31] ELECTRON TRAPPING AND CHEMICAL-COMPOSITION IN RADIO-FREQUENCY GLOW-DISCHARGE A-SIN-H
VARHUE, WJ
MANGLORE, RB
PANDELISEV, KA
PASTEL, PW
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1991, 9 (06): : 3078 - 3083
[32] Determination of fluorine in cupper by radio-frequency powered glow-discharge plasma source emission spectrometry associated with laser ablation sampling
Ushirozawa, Y
Matsuta, H
Wagatsuma, K
BUNSEKI KAGAKU, 2004, 53 (07) : 699 - 703
[33] Radio-frequency glow discharge spectrometry: A critical review
Winchester, MR
Payling, R
SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 2004, 59 (05) : 607 - 666
[34] RADIO-FREQUENCY GLOW-DISCHARGE MASS-SPECTROMETRY FOR THE ANALYSIS OF BULK METALS, GLASSES, FILMS, AND POLYMERS
MARCUS, RK
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1994, 208 : 140 - ANYL
[35] PROPERTIES OF AMORPHOUS-SILICON TIN ALLOYS PRODUCED USING THE RADIO-FREQUENCY GLOW-DISCHARGE TECHNIQUE
MAHAN, AH
WILLIAMSON, DL
MADAN, A
APPLIED PHYSICS LETTERS, 1984, 44 (02) : 220 - 222
[36] PLASMA PARAMETERS OF A RADIO-FREQUENCY DISCHARGE
ANDERSON, CA
HOPKINS, MB
GRAHAM, WG
REVIEW OF SCIENTIFIC INSTRUMENTS, 1990, 61 (01): : 448 - 450
[37] DEPOSITION OF THIN-FILMS BY DECOMPOSITION OF TETRA-ETHOXY SILANE IN A RADIO-FREQUENCY GLOW-DISCHARGE
MUKHERJEE, SP
EVANS, PE
THIN SOLID FILMS, 1972, 14 (01) : 105 - 118
[38] ELECTRON-ENERGY DISTRIBUTION FUNCTION MEASUREMENTS IN A PLANAR INDUCTIVE OXYGEN RADIO-FREQUENCY GLOW-DISCHARGE
BARNES, MS
FORSTER, JC
KELLER, JH
APPLIED PHYSICS LETTERS, 1993, 62 (21) : 2622 - 2624
[39] ANALYSIS OF PRECIOUS-METAL ALLOYS BY RADIO-FREQUENCY GLOW-DISCHARGE ATOMIC-EMISSION SPECTROMETRY
HARVILLE, TR
MARCUS, RK
ANALYTICAL CHEMISTRY, 1995, 67 (07) : 1271 - 1277
[40] ATOMIC MICROSTRUCTURE AND ELECTRONIC-PROPERTIES OF A-SINX-H DEPOSITED BY RADIO-FREQUENCY GLOW-DISCHARGE
MAEDA, K
UMEZU, I
JOURNAL OF APPLIED PHYSICS, 1991, 70 (05) : 2745 - 2754

← 1 2 3 4 5 →