ON-CHIP CAPACITANCE MEASUREMENT CIRCUITS IN VSLI STRUCTURES

被引：10
|
作者：
IWAI, H
KOHYAMA, S
机构：
来源：
IEEE TRANSACTIONS ON ELECTRON DEVICES | 1982年 / 29卷 / 10期
关键词：
D O I：
10.1109/T-ED.1982.20924
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：1622 / 1626
页数：5
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