DEEP MELTING OF SILICON-WAFERS

被引：0
|
作者：
WILSON, LO
CELLER, GK
TRIMBLE, LE
机构：
[1] AT&T Bell Lab, Murray Hill, NJ,, USA, AT&T Bell Lab, Murray Hill, NJ, USA
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1986年 / 133卷 / 02期
关键词：
D O I：
10.1149/1.2108584
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
12
引用
收藏
页码：383 / 389
页数：7
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