ELECTRON MICROSCOPICAL ANALYSIS OF THE STACKING-FAULT BEHAVIOR IN INERT-GAS ANNEALED CZOCHRALSKI SILICON

被引：0

作者：

BENDER, H ^{[1
]}

CLAEYS, C ^{[1
]}

VANLANDUYT, J ^{[1
]}

DECLERCK, G ^{[1
]}

AMELINCKX, S ^{[1
]}

VANOVERSTRAETEN, R ^{[1
]}

机构：

[1] CATHOLIC UNIV LEUVEN, ESAT, B-3030 HEVERLE, BELGIUM

来源：

LECTURE NOTES IN PHYSICS | 1983年 / 175卷

关键词：

D O I：

暂无

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：134 / 139

页数：6

共 26 条

[1] DEPTH PROFILE OF BULK STACKING-FAULT RADIUS IN CZOCHRALSKI SILICON
WADA, K
INOUE, N
JOURNAL OF APPLIED PHYSICS, 1985, 58 (03) : 1183 - 1186
[2] INHOMOGENEOUS OXYGEN PRECIPITATION AND STACKING-FAULT FORMATION IN CZOCHRALSKI SILICON
INOUE, N
OOSAKA, J
JAPANESE JOURNAL OF APPLIED PHYSICS, 1978, 17 (11) : 2051 - 2052
[3] ELECTRON-STATES OF A STACKING-FAULT RIBBON IN SILICON
LEHTO, N
MARKLUND, S
WANG, YL
SOLID STATE COMMUNICATIONS, 1994, 92 (12) : 987 - 989
[4] On the dynamics of the oxidation-induced stacking-fault ring in as-grown Czochralski silicon crystals
Sinno, T
Brown, RA
vonAmmon, W
Dornberger, E
APPLIED PHYSICS LETTERS, 1997, 70 (17) : 2250 - 2252
[5] On the dynamics of the oxidation-induced stacking-fault ring in as-grown Czochralski silicon crystals
Appl Phys Lett, 17 (2250):
[6] Behavior of oxidation-induced stacking faults in annealed Czochralski silicon doped by nitrogen
Yang, D
Chu, J
Xu, J
Que, DL
JOURNAL OF APPLIED PHYSICS, 2003, 93 (11) : 8926 - 8929
[7] ELECTRON-MICROSCOPE STUDY OF STACKING-FAULT FORMATION IN BORON IMPLANTED SILICON
COMER, JJ
RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1978, 36 (1-2): : 57 - 61
[8] THE ELECTRICAL BEHAVIOR OF INDIVIDUAL DISLOCATIONS, SHOCKLEY PARTIALS AND STACKING-FAULT RIBBONS IN SILICON
OURMAZD, A
WILSHAW, PR
BOOKER, GR
PHYSICA B & C, 1983, 116 (1-3): : 600 - 605
[9] Point defect dynamics and the oxidation-induced stacking-fault ring in Czochralski-grown silicon crystals
Sinno, T
Brown, RA
von Ammon, W
Dornberger, E
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1998, 145 (01) : 302 - 318
[10] COMPUTER-SIMULATION OF CZOCHRALSKI SILICON THERMAL HISTORY AND ITS EFFECT ON BULK STACKING-FAULT NUCLEI GENERATION
VIRZI, A
PORRINI, M
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1993, 17 (1-3): : 196 - 201

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