PREPARATION AND STRUCTURE OF THIN FILMS OF BORON ON SILICON

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作者：
PETERS, ET
POTTER, WD
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TRANSACTIONS OF THE METALLURGICAL SOCIETY OF AIME | 1965年 / 233卷 / 03期
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中图分类号：
TF [冶金工业];
学科分类号：
0806 ;
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页码：473 / &
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