OPTICAL-PROPERTIES OF RF PLASMA DEPOSITED AND ION-BEAM DEPOSITED AMORPHOUS-CARBON FILMS

被引：0
|
作者：
MATHINE, D [1 ]
KHAN, AA [1 ]
BUABBUD, G [1 ]
WOOLLAM, JA [1 ]
BANKS, BA [1 ]
DOMITZ, S [1 ]
机构：
[1] UNIV NEBRASKA,DEPT ELECT ENGN,LINCOLN,NE 68588
来源：
CARBON | 1984年 / 22卷 / 02期
关键词：
D O I：
10.1016/0008-6223(84)90364-6
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：220 / 220
页数：1
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