SURFACE-ROUGHNESS FOR METALLIC THIN-FILMS DEPOSITED UPON VARIOUS DIELECTRIC COATINGS

被引：11

作者：

VARNIER, F ^{[1
]}

MAYANI, N ^{[1
]}

RASIGNI, G ^{[1
]}

RASIGNI, M ^{[1
]}

LLEBARIA, A ^{[1
]}

机构：

[1] LAB ASTRON SPATIALE,F-13012 MARSEILLE,FRANCE

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 04期

关键词：

D O I：

10.1116/1.574503

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1806 / 1808

页数：3

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