SURFACE-ROUGHNESS FOR METALLIC THIN-FILMS DEPOSITED UPON VARIOUS DIELECTRIC COATINGS

被引：11
|
作者：
VARNIER, F [1 ]
MAYANI, N [1 ]
RASIGNI, G [1 ]
RASIGNI, M [1 ]
LLEBARIA, A [1 ]
机构：
[1] LAB ASTRON SPATIALE,F-13012 MARSEILLE,FRANCE
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 04期
关键词：
D O I：
10.1116/1.574503
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：1806 / 1808
页数：3
相关论文
共 50 条
  • [21] SURFACE-ROUGHNESS REDUCTION IN ATOMIC LAYER EPITAXY GROWTH OF TITANIUM-DIOXIDE THIN-FILMS
    RITALA, M
    LESKELA, M
    NIINISTO, L
    PROHASKA, T
    FRIEDBACHER, G
    GRASSERBAUER, M
    THIN SOLID FILMS, 1994, 249 (02) : 155 - 162
  • [22] INFLUENCE OF THE SURFACE-ROUGHNESS ON THE DETERMINATION OF THE OPTICAL-PARAMETERS OF SNO2 THIN-FILMS
    ARDEBILI, R
    CHARLES, JP
    MARTIN, L
    MARUCCHI, J
    MANIFACIER, JC
    MATERIALS RESEARCH BULLETIN, 1990, 25 (11) : 1407 - 1413
  • [23] SOME ASPECTS OF SURFACE-ROUGHNESS IN POLYCRYSTALLINE THIN-FILMS - OPTICAL-CONSTANTS AND GRAIN DISTRIBUTION
    BHATTACHARYYA, D
    CHAUDHURI, S
    PAL, AK
    BHATTACHARYYA, SK
    VACUUM, 1992, 43 (12) : 1201 - 1205
  • [24] DEPENDENCE OF THE DEPTH OF SURFACE-ROUGHNESS UPON MEAN ARITHMETICAL ROUGHNESS OF THE GROUND SURFACE BY VARIOUS WAY
    CEBALO, R
    STROJARSTVO, 1993, 35 (5-6): : 231 - 235
  • [25] INFLUENCE OF VARIOUS UNDERLAYERS ON THE SURFACE-ROUGHNESS OF EVAPORATED SILVER FILMS
    ORLOWSKI, R
    URNER, P
    HORNAUER, DL
    SURFACE SCIENCE, 1979, 82 (01) : 69 - 78
  • [26] SURFACE-ROUGHNESS AND FRACTAL NATURE OF THIN-FILMS OF MGF2 AND AG MGF2
    VARNIER, F
    MAYANI, N
    RASIGNI, G
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1989, 7 (03): : 1289 - 1293
  • [27] INFLUENCE OF PREPARATION CONDITIONS ON THE SURFACE-ROUGHNESS OF SIC THIN-FILMS COATED ON 304 STAINLESS-STEEL
    HIROHATA, Y
    NEMOTO, Y
    HINO, T
    YAMASHINA, T
    THIN SOLID FILMS, 1992, 214 (02) : 150 - 155
  • [28] INVESTIGATIONS ON ANISOTROPIC SURFACE-ROUGHNESS OF THIN-FILMS USING X-RAY SPECULAR REFLECTION TOPOGRAPHY
    CHANG, SL
    CARDOSO, LP
    MOEHLECKE, S
    JOURNAL OF CRYSTAL GROWTH, 1985, 73 (01) : 43 - 47
  • [29] MACROSCOPIC SURFACE-ROUGHNESS AND THE RESISTIVITY OF THIN METAL-FILMS
    ELSOM, KC
    SAMBLES, JR
    JOURNAL OF PHYSICS F-METAL PHYSICS, 1981, 11 (03): : 647 - 656
  • [30] SURFACE-ROUGHNESS PROFILES AND COATINGS PERFORMANCE
    HANSEN, CM
    JOURNAL OF PAINT TECHNOLOGY, 1972, 44 (570): : 61 - &
12345