SURFACE-ROUGHNESS FOR METALLIC THIN-FILMS DEPOSITED UPON VARIOUS DIELECTRIC COATINGS

被引：11
|
作者：
VARNIER, F [1 ]
MAYANI, N [1 ]
RASIGNI, G [1 ]
RASIGNI, M [1 ]
LLEBARIA, A [1 ]
机构：
[1] LAB ASTRON SPATIALE,F-13012 MARSEILLE,FRANCE
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 04期
关键词：
D O I：
10.1116/1.574503
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：1806 / 1808
页数：3
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