共 50 条
- [12] Chemical-mechanical planarization advances with the times IEEE Potentials, 2008, 1 (26-30): : 26 - 30
- [14] CHAMPS (CHemicAl-Mechanical Planarization Simulator) 2000 INTERNATIONAL CONFERENCE ON SIMULATION OF SEMICONDUCTOR PROCESSES AND DEVICES, 2000, : 123 - 126
- [16] Chemical-mechanical planarization of Cu and Ta JOM-JOURNAL OF THE MINERALS METALS & MATERIALS SOCIETY, 2001, 53 (06): : 50 - 52
- [18] Tribological Behavior in chemical-mechanical planarization CONTRIBUTIONS OF SURFACE ENGINEERING TO MODERN MANUFACTURING AND REMANUFACTURING, 2002, : 95 - 101