Chemical-mechanical polishing shines mirrors

被引：0

作者：

Moeggenborg, Kevin ^{[1
]}

Batllo, Francois ^{[1
]}

McMullen, Daniel ^{[1
]}

Reggie, Stan ^{[1
]}

机构：

[1] Cabot Microelect, Aurora, IL 60504 USA

来源：

LASER FOCUS WORLD | 2008年 / 44卷 / 06期

关键词：

D O I：

暂无

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A new chemical-mechanical polishing technique extends the use of monolithic aluminium optics beyond the infrared and into the visible and ultraviolet spectrum for imaging and beam-steering applications.

引用

页码：90 / 93

页数：4

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