共 50 条
- [41] Shearing interferometry for at wavelength wavefront measurement of extreme-ultraviolet lithography projection optics JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2003, 42 (9A): : 5844 - 5847
- [43] Absolute extreme-ultraviolet metrology HARNESSING LIGHT: OPTICAL SCIENCE AND METROLOGY AT NIST, 2001, 4450 : 94 - 107
- [45] EXTREME-ULTRAVIOLET INTERFERENCE LITHOGRAPHY JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, 2009, 8 (02):
- [49] Solar observations of high-temperature emission with the Extreme-Ultraviolet Imaging Spectrometer on Hinode ASTROPHYSICAL JOURNAL, 2008, 685 (02): : 1277 - 1285
- [50] HOT PLASMA IN NONFLARING ACTIVE REGIONS OBSERVED BY THE EXTREME-ULTRAVIOLET IMAGING SPECTROMETER ON HINODE ASTROPHYSICAL JOURNAL, 2009, 697 (02): : 1956 - 1970